Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10707116 | Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions | Jingmei Liang, Yong Sun, Jinrui GUO, Jung Chan Lee, Tza-Jing Gung +1 more | 2020-07-07 |
| 10612135 | Method and system for high temperature clean | Sanjeev Baluja, Kalyanjit Ghosh, Ren-Guan Duan, Mayur Govind Kulkarni, Gregory Siu +4 more | 2020-04-07 |
| 10595477 | Oxide with higher utilization and lower cost | Lei Guo, Milind Gadre, Deenesh Padhi, Tza-Jing Gung | 2020-03-24 |
| 10593543 | Method of depositing doped amorphous silicon films with enhanced defect control, reduced substrate sensitivity to in-film defects and bubble-free film growth | Milind Gadre, Deenesh Padhi | 2020-03-17 |