Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10707116 | Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions | Yong Sun, Jinrui GUO, Praket P. Jha, Jung Chan Lee, Tza-Jing Gung +1 more | 2020-07-07 |