Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10724138 | Process kit for a high throughput processing chamber | Mayur Govind Kulkarni, Sanjeev Baluja, Kien N. Chuc, Sungjin Kim, Yanjie Wang | 2020-07-28 |
| 10636628 | Method for cleaning a process chamber | Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou, Amit Kumar BANSAL, Sanjeev Baluja | 2020-04-28 |
| 10636684 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2020-04-28 |
| 10612135 | Method and system for high temperature clean | Sanjeev Baluja, Ren-Guan Duan, Mayur Govind Kulkarni, Gregory Siu, Praket P. Jha +4 more | 2020-04-07 |
| 10600624 | System and method for substrate processing chambers | Sanjeev Baluja, Mayur Govind Kulkarni, Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou +9 more | 2020-03-24 |