Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10724138 | Process kit for a high throughput processing chamber | Kalyanjit Ghosh, Mayur Govind Kulkarni, Sanjeev Baluja, Sungjin Kim, Yanjie Wang | 2020-07-28 |
| 10711347 | Micro-volume deposition chamber | Dale R. DuBois, Karthik Janakiraman | 2020-07-14 |
| 10550472 | Flow control features of CVD chambers | Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller, Soonam Park +5 more | 2020-02-04 |