| 10748783 |
Gas delivery module |
Adib Khan, Sultan Malik, Srinivas D. Nemani |
2020-08-18 |
| 10720341 |
Gas delivery system for high pressure processing chamber |
Srinivas D. Nemani, Sean S. Kang, Adib Khan, Ellie Yieh |
2020-07-21 |
| 10704141 |
In-situ CVD and ALD coating of chamber to control metal contamination |
Sultan Malik, Srinivas D. Nemani, Adib Khan, Maximillian Clemons |
2020-07-07 |
| 10675581 |
Gas abatement apparatus |
Adib Khan, Sultan Malik, Srinivas D. Nemani, Rafika Smati, Joseph Ng +1 more |
2020-06-09 |
| 10615007 |
Plasma reactor with non-power-absorbing dielectric gas shower plate assembly |
Michael W. Stowell |
2020-04-07 |
| 10590530 |
Gas control in process chamber |
Srinivas D. Nemani, Ellie Yieh |
2020-03-17 |
| 10550472 |
Flow control features of CVD chambers |
Kien N. Chuc, Hanh Nguyen, Xinglong Chen, Matthew L. Miller, Soonam Park +5 more |
2020-02-04 |
| 10529603 |
High pressure wafer processing systems and related methods |
Srinivas D. Nemani, Adib Khan, Venkata Ravishankar Kasibhotla, Sultan Malik, Sean S. Kang +1 more |
2020-01-07 |
