Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840350 | Nanolaminate structure, semiconductor device and method of forming nanolaminate structure | Zi-Wei Fang, Hong-Fa Luan, Wilman Tsai, Kasra Sardashti, Scott Ueda +4 more | 2020-11-17 |
| 10704141 | In-situ CVD and ALD coating of chamber to control metal contamination | Sultan Malik, Srinivas D. Nemani, Qiwei Liang, Adib Khan | 2020-07-07 |
| 10685849 | Damage free metal conductor formation | He Ren, Jong Mun Kim, Minrui Yu, Mehul Naik, Chentsau Chris Ying | 2020-06-16 |
| 10566188 | Method to improve film stability | Michel R. Frei, Mahendra Pakala, Mehul Naik, Srinivas D. Nemani, Ellie Yieh | 2020-02-18 |