Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748783 | Gas delivery module | Qiwei Liang, Sultan Malik, Srinivas D. Nemani | 2020-08-18 |
| 10720341 | Gas delivery system for high pressure processing chamber | Qiwei Liang, Srinivas D. Nemani, Sean S. Kang, Ellie Yieh | 2020-07-21 |
| 10704141 | In-situ CVD and ALD coating of chamber to control metal contamination | Sultan Malik, Srinivas D. Nemani, Qiwei Liang, Maximillian Clemons | 2020-07-07 |
| 10675581 | Gas abatement apparatus | Qiwei Liang, Sultan Malik, Srinivas D. Nemani, Rafika Smati, Joseph Ng +1 more | 2020-06-09 |
| 10550472 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller +5 more | 2020-02-04 |
| 10529603 | High pressure wafer processing systems and related methods | Qiwei Liang, Srinivas D. Nemani, Venkata Ravishankar Kasibhotla, Sultan Malik, Sean S. Kang +1 more | 2020-01-07 |