Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748783 | Gas delivery module | Adib Khan, Qiwei Liang, Srinivas D. Nemani | 2020-08-18 |
| 10704141 | In-situ CVD and ALD coating of chamber to control metal contamination | Srinivas D. Nemani, Qiwei Liang, Adib Khan, Maximillian Clemons | 2020-07-07 |
| 10675581 | Gas abatement apparatus | Adib Khan, Qiwei Liang, Srinivas D. Nemani, Rafika Smati, Joseph Ng +1 more | 2020-06-09 |
| 10529603 | High pressure wafer processing systems and related methods | Qiwei Liang, Srinivas D. Nemani, Adib Khan, Venkata Ravishankar Kasibhotla, Sean S. Kang +1 more | 2020-01-07 |