Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10845317 | Particle detection for substrate processing | Todd Egan, Mehdi Vaez-Iravani, Samer Banna, Gregory L. Kirk, Abraham Ravid +1 more | 2020-11-24 |
| 10553398 | Power deposition control in inductively coupled plasma (ICP) reactors | Samer Banna, Tza-Jing Gung, Vladimir Knyazik, Dan Marohl, Valentin N. Todorow +1 more | 2020-02-04 |