Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10845317 | Particle detection for substrate processing | Todd Egan, Samer Banna, Kyle Tantiwong, Gregory L. Kirk, Abraham Ravid +1 more | 2020-11-24 |
| 10816464 | Imaging reflectometer | Guoheng Zhao, Todd Egan | 2020-10-27 |
| 10705431 | Quarter wave light splitting | Christopher Dennis Bencher, Joseph R. Johnson, David A. Markle | 2020-07-07 |
| 10599044 | Digital lithography with extended field size | Guoheng Zhao, Jeremy Nesbitt, Christopher Dennis Bencher | 2020-03-24 |
| 10527407 | In-situ metrology method for thickness measurement during PECVD processes | Khokan Chandra Paul, Edward W. Budiarto, Todd Egan, Jeongmin Lee, Dale R. Du Bois +1 more | 2020-01-07 |