Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10845317 | Particle detection for substrate processing | Todd Egan, Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong, Abraham Ravid +1 more | 2020-11-24 |
| 10736182 | Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers | Matthew J. Busche, Wendell Glenn Boyd, Jr., Todd Egan, Vijay D. Parkhe, Michael R. Rice +1 more | 2020-08-04 |