Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816464 | Imaging reflectometer | Mehdi Vaez-Iravani, Todd Egan | 2020-10-27 |
| 10739275 | Simultaneous multi-directional laser wafer inspection | Sheng Liu, Ben-ming Benjamin Tsai | 2020-08-11 |
| 10670537 | Systems and methods for defect material classification | J. K. Leong, Michael D. Kirk | 2020-06-02 |
| 10634487 | Method and system for optical three dimensional topography measurement | Maarten J. van der Burgt, Sheng Liu, Andy Hill, Johan De Greeve, Karel Van Gils | 2020-04-28 |
| 10599044 | Digital lithography with extended field size | Jeremy Nesbitt, Christopher Dennis Bencher, Mehdi Vaez-Iravani | 2020-03-24 |