Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790120 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Hamid Noorbakhsh, Jisoo Kim, Wonseok Lee, Usama Dadu | 2020-09-29 |
| 10625277 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye, Jennifer Y. Sun +1 more | 2020-04-21 |
| 10607816 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Hamid Noorbakhsh, Jisoo Kim, Wonseok Lee, Usama Dadu | 2020-03-31 |
| 10586718 | Cooling base with spiral channels for ESC | Shahid Rauf, Stephen Prouty, Roland Smith, Denis M. Koosau | 2020-03-10 |
| 10553398 | Power deposition control in inductively coupled plasma (ICP) reactors | Samer Banna, Tza-Jing Gung, Kyle Tantiwong, Dan Marohl, Valentin N. Todorow +1 more | 2020-02-04 |