Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818490 | Controlled growth of thin silicon oxide film at low temperature | Shishi Jiang, Pramit Manna, Abhijit Basu Mallick, Steven Verhaverbeke | 2020-10-27 |
| 10790183 | Selective oxidation for 3D device isolation | Shiyu Sun, Keith Tatseun Wong, Namsung Kim, Srinivas D. Nemani | 2020-09-29 |
| 10636705 | High pressure annealing of metal gate structures | Yifei Wang, Fei Wang, Xin Liu, Wei V. Tang, Yixiong Yang +2 more | 2020-04-28 |
| 10636677 | High pressure and high temperature anneal chamber | Jean Delmas, Steven Verhaverbeke | 2020-04-28 |
| 10636669 | Seam healing using high pressure anneal | Yihong Chen, Rui Cheng, Pramit Manna, Abhijit Basu Mallick, Shishi Jiang +2 more | 2020-04-28 |
| 10559496 | Techniques for filling a structure using selective surface modification | Steven Verhaverbeke | 2020-02-11 |
| 10529585 | Dry stripping of boron carbide hardmask | Pramit Manna, Shishi Jiang, Abhijit Basu Mallick | 2020-01-07 |