Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879081 | Methods of reducing or eliminating defects in tungsten film | Guoqiang Jian, Chi-Chou Lin, Paul F. Ma, Kai Wu, Vikash Banthia +4 more | 2020-12-29 |
| 10755947 | Methods of increasing selectivity for selective etch processes | Wenyu Zhang, Yixiong Yang, Mario D. Sanchez, Guoqiang Jian, Paul F. Ma | 2020-08-25 |
| 10665450 | Methods and apparatus for doping engineering and threshold voltage tuning by integrated deposition of titanium nitride and aluminum films | Yixiong Yang, Paul F. Ma, Wenyu Zhang, Shih Chung Chen, CHEN-HAN LIN +6 more | 2020-05-26 |
| 10636705 | High pressure annealing of metal gate structures | Yifei Wang, Kurtis Leschkies, Fei Wang, Xin Liu, Yixiong Yang +2 more | 2020-04-28 |