Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755947 | Methods of increasing selectivity for selective etch processes | Wenyu Zhang, Mario D. Sanchez, Guoqiang Jian, Wei V. Tang, Paul F. Ma | 2020-08-25 |
| 10665450 | Methods and apparatus for doping engineering and threshold voltage tuning by integrated deposition of titanium nitride and aluminum films | Paul F. Ma, Wei V. Tang, Wenyu Zhang, Shih Chung Chen, CHEN-HAN LIN +6 more | 2020-05-26 |
| 10636705 | High pressure annealing of metal gate structures | Yifei Wang, Kurtis Leschkies, Fei Wang, Xin Liu, Wei V. Tang +2 more | 2020-04-28 |