Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879081 | Methods of reducing or eliminating defects in tungsten film | Wei V. Tang, Chi-Chou Lin, Paul F. Ma, Kai Wu, Vikash Banthia +4 more | 2020-12-29 |
| 10755947 | Methods of increasing selectivity for selective etch processes | Wenyu Zhang, Yixiong Yang, Mario D. Sanchez, Wei V. Tang, Paul F. Ma | 2020-08-25 |
| 10643840 | Selective deposition defects removal by chemical etch | Jeffrey W. Anthis, Chang Ke, Pratham Jain, Benjamin Schmiege, Michael S. Jackson +3 more | 2020-05-05 |