Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10760159 | Methods and apparatus for depositing yttrium-containing films | Lakmal C. Kalutarage, Mark Saly, Thomas Knisley, David Thompson | 2020-09-01 |
| 10643838 | In-situ formation of non-volatile lanthanide thin film precursors and use in ALD and CVD | Jeffrey W. Anthis, David Thompson | 2020-05-05 |
| 10643840 | Selective deposition defects removal by chemical etch | Jeffrey W. Anthis, Chang Ke, Pratham Jain, Guoqiang Jian, Michael S. Jackson +3 more | 2020-05-05 |
| 10633743 | System and method for controllable non-volatile metal removal | Tsung-Liang Chen, Jeffrey W. Anthis, Glen Gilchrist | 2020-04-28 |
| 10577386 | Ruthenium precursors for ALD and CVD thin film deposition and uses thereof | Jeffrey W. Anthis, David Thompson | 2020-03-03 |