Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10730082 | Apparatus and method for differential in situ cleaning | Costel Biloiu, Shurong Liang, Christopher Campbell, Vikram Singh | 2020-08-04 |
| 10633743 | System and method for controllable non-volatile metal removal | Tsung-Liang Chen, Benjamin Schmiege, Jeffrey W. Anthis | 2020-04-28 |
| 10600616 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Shurong Liang, Costel Biloiu, Vikram Singh, Christopher Campbell, Richard J. Hertel +1 more | 2020-03-24 |
| 10535522 | Angular control of ion beam for vertical surface treatment | Gang Shu, Shurong Liang | 2020-01-14 |