Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10600616 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Shurong Liang, Costel Biloiu, Glen Gilchrist, Vikram Singh, Christopher Campbell +1 more | 2020-03-24 |