Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763072 | Apparatus, system and techniques for mass analyzed ion beam | Frank Sinclair, Joseph C. Olson, Alexandre Likhanskii | 2020-09-01 |
| 10730082 | Apparatus and method for differential in situ cleaning | Glen Gilchrist, Shurong Liang, Christopher Campbell, Vikram Singh | 2020-08-04 |
| 10665433 | Extreme edge uniformity control | Alexandre Likhanskii, Maureen Petterson, John Hautala, Anthony Renau, Christopher A. Rowland | 2020-05-26 |
| 10600616 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Shurong Liang, Glen Gilchrist, Vikram Singh, Christopher Campbell, Richard J. Hertel +1 more | 2020-03-24 |