Issued Patents 2020
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867773 | Apparatus and techniques for generating bunched ion beam | — | 2020-12-15 |
| 10866503 | Low emission implantation mask and substrate assembly | Julian G. Blake | 2020-12-15 |
| 10811214 | Low emission cladding and ion implanter | Julian G. Blake | 2020-10-20 |
| 10804068 | Electostatic filter and method for controlling ion beam properties using electrostatic filter | Alexandre Likhanskii, Shengwu Chang | 2020-10-13 |
| 10790116 | Electostatic filter and method for controlling ion beam using electostatic filter | Alexandre Likhanskii, Shengwu Chang | 2020-09-29 |
| 10763071 | Compact high energy ion implantation system | — | 2020-09-01 |
| 10763072 | Apparatus, system and techniques for mass analyzed ion beam | Costel Biloiu, Joseph C. Olson, Alexandre Likhanskii | 2020-09-01 |
| 10748738 | Ion source with tubular cathode | Bon-Woong Koo, Svetlana B. Radovanov, You Chia Li, Peter Ewing, Ajdin Sarajlic +2 more | 2020-08-18 |
| 10741361 | Dual cathode ion source | Bon-Woong Koo, Jun Lu, Eric D. Hermanson, Joseph E. Pierro, Michael D. Johnson +2 more | 2020-08-11 |
| 10714301 | Conductive beam optics for reducing particles in ion implanter | Shengwu Chang, Alexandre Likhanskii, Christopher Campbell, Robert C. Lindberg | 2020-07-14 |
| 10692697 | Apparatus and techniques for decelerated ion beam with no energy contamination | Daniel R. Tieger, Klaus Becker | 2020-06-23 |
| 10665415 | Apparatus and method for controlling ion beam properties using electrostatic filter | Alexandre Likhanskii, Shengwu Chang | 2020-05-26 |
| 10651011 | Apparatus and techniques for generating bunched ion beam | — | 2020-05-12 |