Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804068 | Electostatic filter and method for controlling ion beam properties using electrostatic filter | Frank Sinclair, Shengwu Chang | 2020-10-13 |
| 10790116 | Electostatic filter and method for controlling ion beam using electostatic filter | Frank Sinclair, Shengwu Chang | 2020-09-29 |
| 10763072 | Apparatus, system and techniques for mass analyzed ion beam | Frank Sinclair, Costel Biloiu, Joseph C. Olson | 2020-09-01 |
| 10714301 | Conductive beam optics for reducing particles in ion implanter | Shengwu Chang, Frank Sinclair, Christopher Campbell, Robert C. Lindberg | 2020-07-14 |
| 10665415 | Apparatus and method for controlling ion beam properties using electrostatic filter | Frank Sinclair, Shengwu Chang | 2020-05-26 |
| 10665433 | Extreme edge uniformity control | Maureen Petterson, John Hautala, Anthony Renau, Christopher A. Rowland, Costel Biloiu | 2020-05-26 |