Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714301 | Conductive beam optics for reducing particles in ion implanter | Shengwu Chang, Frank Sinclair, Alexandre Likhanskii, Christopher Campbell | 2020-07-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714301 | Conductive beam optics for reducing particles in ion implanter | Shengwu Chang, Frank Sinclair, Alexandre Likhanskii, Christopher Campbell | 2020-07-14 |