SC

Shengwu Chang

Applied Materials: 3 patents #204 of 1,256Top 20%
VA Varian Semiconductor Equipment Associates: 1 patents #41 of 114Top 40%
🗺 Massachusetts: #1,014 of 14,474 inventorsTop 8%
Overall (2020): #44,722 of 565,922Top 8%
4
Patents 2020

Issued Patents 2020

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
10804068 Electostatic filter and method for controlling ion beam properties using electrostatic filter Alexandre Likhanskii, Frank Sinclair 2020-10-13
10790116 Electostatic filter and method for controlling ion beam using electostatic filter Alexandre Likhanskii, Frank Sinclair 2020-09-29
10714301 Conductive beam optics for reducing particles in ion implanter Frank Sinclair, Alexandre Likhanskii, Christopher Campbell, Robert C. Lindberg 2020-07-14
10665415 Apparatus and method for controlling ion beam properties using electrostatic filter Alexandre Likhanskii, Frank Sinclair 2020-05-26