Issued Patents 2020
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10823888 | Methods of producing slanted gratings with variable etch depths | Morgan Evans, Rutger Meyer Timmerman Thijssen | 2020-11-03 |
| 10818499 | Optical component having variable depth gratings and method of formation | John Hautala, Morgan Evans, Rutger Meyer Timmerman Thijssen | 2020-10-27 |
| 10795173 | System and method for optimally forming gratings of diffracted optical elements | Morgan Evans, Rutger Meyer Timmerman Thijssen, Peter Kurunczi | 2020-10-06 |
| 10775158 | System and method for detecting etch depth of angled surface relief gratings | Ludovic Godet, Rutger Meyer Timmerman Thijssen, Morgan Evans | 2020-09-15 |
| 10763072 | Apparatus, system and techniques for mass analyzed ion beam | Frank Sinclair, Costel Biloiu, Alexandre Likhanskii | 2020-09-01 |
| 10761334 | System and method for optimally forming gratings of diffracted optical elements | Morgan Evans, Rutger Meyer Timmerman Thijssen, Peter Kurunczi | 2020-09-01 |
| 10607847 | Gate all around device and method of formation using angled ions | Min Gyu Sung, Sony Varghese, Anthony Renau, Morgan Evans | 2020-03-31 |
| 10598832 | System and method for forming diffracted optical element having varied gratings | Morgan Evans, Rutger Meyer Timmerman Thijssen, Peter Kurunczi, Robert Masci | 2020-03-24 |
| 10545408 | Performance improvement of EUV photoresist by ion implantation | Tristan Y. Ma, Huixiong Dai, Anthony Renau, John Hautala | 2020-01-28 |