Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553448 | Techniques for processing a polycrystalline layer using an angled ion beam | Morgan Evans, Kevin Anglin, Robert Masci, John Hautala | 2020-02-04 |
| 10545408 | Performance improvement of EUV photoresist by ion implantation | Huixiong Dai, Anthony Renau, John Hautala, Joseph C. Olson | 2020-01-28 |