Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692872 | Device structure for forming semiconductor device having angled contacts | Sony Varghese, Morgan Evans, John Hautala, Joe Olson | 2020-06-23 |
| 10665433 | Extreme edge uniformity control | Alexandre Likhanskii, Maureen Petterson, John Hautala, Christopher A. Rowland, Costel Biloiu | 2020-05-26 |
| 10607847 | Gate all around device and method of formation using angled ions | Min Gyu Sung, Sony Varghese, Morgan Evans, Joseph C. Olson | 2020-03-31 |
| 10545408 | Performance improvement of EUV photoresist by ion implantation | Tristan Y. Ma, Huixiong Dai, John Hautala, Joseph C. Olson | 2020-01-28 |