Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665433 | Extreme edge uniformity control | Alexandre Likhanskii, John Hautala, Anthony Renau, Christopher A. Rowland, Costel Biloiu | 2020-05-26 |
| 10532228 | Multi-color charged particle detector apparatus and method of use thereof | W. Davis Lee | 2020-01-14 |