Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825665 | Directional treatment for multi-dimensional device processing | Ludovic Godet, Srinivas D. Nemani, Ellie Yieh, Nitin K. Ingle | 2020-11-03 |
| 10643895 | Self-aligned interconnects formed using subtractive techniques | Bencherki Mebarki, Yongmei Chen, He Ren, Mehul Naik | 2020-05-05 |
| 10545408 | Performance improvement of EUV photoresist by ion implantation | Tristan Y. Ma, Anthony Renau, John Hautala, Joseph C. Olson | 2020-01-28 |