Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10730082 | Apparatus and method for differential in situ cleaning | Glen Gilchrist, Costel Biloiu, Shurong Liang, Christopher Campbell | 2020-08-04 |
| 10600616 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Shurong Liang, Costel Biloiu, Glen Gilchrist, Christopher Campbell, Richard J. Hertel +1 more | 2020-03-24 |