Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840132 | Methods for forming elongated contact hole ends | Glen F. R. Gilchrist | 2020-11-17 |
| 10730082 | Apparatus and method for differential in situ cleaning | Glen Gilchrist, Costel Biloiu, Christopher Campbell, Vikram Singh | 2020-08-04 |
| 10699871 | System and method for spatially resolved optical metrology of an ion beam | Gang Shu, Glen F. R. Gilchrist | 2020-06-30 |
| 10600616 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Costel Biloiu, Glen Gilchrist, Vikram Singh, Christopher Campbell, Richard J. Hertel +1 more | 2020-03-24 |
| 10535522 | Angular control of ion beam for vertical surface treatment | Gang Shu, Glen Gilchrist | 2020-01-14 |