Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840132 | Methods for forming elongated contact hole ends | Shurong Liang | 2020-11-17 |
| 10699871 | System and method for spatially resolved optical metrology of an ion beam | Gang Shu, Shurong Liang | 2020-06-30 |