Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10831096 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie +3 more | 2020-11-10 |
| 10804094 | Methods of depositing SiCON with C, O and N compositional control | Mark Saly, David Thompson, Bhaskar Jyoti Bhuyan | 2020-10-13 |
| 10760159 | Methods and apparatus for depositing yttrium-containing films | Lakmal C. Kalutarage, Mark Saly, Benjamin Schmiege, David Thompson | 2020-09-01 |
| 10697060 | Iridium precursors for ALD and CVD thin film deposition and uses thereof | — | 2020-06-30 |
| 10633740 | Methods for depositing coatings on aerospace components | Yuriy Melnik, Sukti Chatterjee, Kaushal Gangakhedkar, Jonathan Frankel, Lance A. Scudder +4 more | 2020-04-28 |