Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10831096 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie, Thomas Knisley +3 more | 2020-11-10 |
| 10775149 | Light source failure identification in an optical metrology device | Troy Daniel Ribaudo | 2020-09-15 |