Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10831096 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Dennis M. Hausmann, Adrien LaVoie, Thomas Knisley +3 more | 2020-11-10 |
| 10697874 | Estimation of lifetime remaining for a consumable-part in a semiconductor manufacturing chamber | — | 2020-06-30 |
| 10615009 | System implementing machine learning in complex multivariate wafer processing equipment | Joydeep Guha, John Daugherty, Vahid Vahedi | 2020-04-07 |
| 10585347 | Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework | Saravanapriyan Sriraman, Richard Wise, Harmeet Singh, Alex Paterson, Andrew D. Bailey, III +1 more | 2020-03-10 |