Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825661 | Systems for cooling RF heated chamber components | Jon McChesney, Richard A. Marsh, Alexander Paterson, John Holland | 2020-11-03 |
| 10690374 | Air cooled faraday shield and methods for using the same | John Drewery, Jon McChesney, Alex Paterson | 2020-06-23 |
| 10585347 | Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework | Richard Wise, Harmeet Singh, Alex Paterson, Andrew D. Bailey, III, Vahid Vahedi +1 more | 2020-03-10 |
| 10572697 | Method of etch model calibration using optical scatterometry | Ye Feng, Marcus Musselman, Andrew D. Bailey, III, Mehmet Derya Tetiker, Yan Zhang +1 more | 2020-02-25 |
| 10534257 | Layout pattern proximity correction through edge placement error prediction | Mehmet Derya Tetiker, Andrew D. Bailey, III, Richard Wise | 2020-01-14 |