RM

Richard A. Marsh

Lam Research: 1 patents #178 of 457Top 40%
Overall (2020): #302,042 of 565,922Top 55%
1
Patents 2020

Issued Patents 2020

Patent #TitleCo-InventorsDate
10825661 Systems for cooling RF heated chamber components Jon McChesney, Saravanapriyan Sriraman, Alexander Paterson, John Holland 2020-11-03