Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879044 | Auxiliary circuit in RF matching network for frequency tuning assisted dual-level pulsing | Yuhou Wang, Arthur H. Sato, Ying Wu | 2020-12-29 |
| 10847345 | Direct drive RF circuit for substrate processing systems | Maolin Long | 2020-11-24 |
| 10825661 | Systems for cooling RF heated chamber components | Jon McChesney, Saravanapriyan Sriraman, Richard A. Marsh, John Holland | 2020-11-03 |
| 10651013 | Systems and methods for tuning to reduce reflected power in multiple states | Jon McChesney | 2020-05-12 |
| 10541168 | Edge ring centering method using ring dynamic alignment data | Ali Sucipto Tan, Haoquan Yan, Marc Estoque, Damon Tyrone Genetti, Jon McChesney | 2020-01-21 |