HY

Haoquan Yan

Lam Research: 2 patents #102 of 457Top 25%
Overall (2020): #169,455 of 565,922Top 30%
2
Patents 2020

Issued Patents 2020

Patent #TitleCo-InventorsDate
10658222 Moveable edge coupling ring for edge process control during semiconductor wafer processing Robert Griffith O'Neill, Raphael Casaes, Jon McChesney, Alex Paterson 2020-05-19
10541168 Edge ring centering method using ring dynamic alignment data Ali Sucipto Tan, Marc Estoque, Damon Tyrone Genetti, Jon McChesney, Alexander Paterson 2020-01-21