Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10658222 | Moveable edge coupling ring for edge process control during semiconductor wafer processing | Haoquan Yan, Raphael Casaes, Jon McChesney, Alex Paterson | 2020-05-19 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10658222 | Moveable edge coupling ring for edge process control during semiconductor wafer processing | Haoquan Yan, Raphael Casaes, Jon McChesney, Alex Paterson | 2020-05-19 |