| 10825661 |
Systems for cooling RF heated chamber components |
Saravanapriyan Sriraman, Richard A. Marsh, Alexander Paterson, John Holland |
2020-11-03 |
| 10770339 |
Automated replacement of consumable parts using interfacing chambers |
Damon Tyrone Genetti, Alex Paterson, Derek John Witkowicki, Austin Ngo |
2020-09-08 |
| 10690374 |
Air cooled faraday shield and methods for using the same |
Saravanapriyan Sriraman, John Drewery, Alex Paterson |
2020-06-23 |
| 10658222 |
Moveable edge coupling ring for edge process control during semiconductor wafer processing |
Haoquan Yan, Robert Griffith O'Neill, Raphael Casaes, Alex Paterson |
2020-05-19 |
| 10651013 |
Systems and methods for tuning to reduce reflected power in multiple states |
Alexander Paterson |
2020-05-12 |
| 10600620 |
Temperature control in RF chamber with heater and air amplifier |
Alex Paterson |
2020-03-24 |
| 10541168 |
Edge ring centering method using ring dynamic alignment data |
Ali Sucipto Tan, Haoquan Yan, Marc Estoque, Damon Tyrone Genetti, Alexander Paterson |
2020-01-21 |
