Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784083 | RF voltage sensor incorporating multiple voltage dividers for detecting RF voltages at a pickup device of a substrate support | Maolin Long, Alex Paterson | 2020-09-22 |
| 10690374 | Air cooled faraday shield and methods for using the same | Saravanapriyan Sriraman, Jon McChesney, Alex Paterson | 2020-06-23 |
| 10679825 | Systems and methods for applying frequency and match tuning in a non-overlapping manner for processing substrate | Ying Wu, Alex Paterson, Arthur H. Sato | 2020-06-09 |