Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847345 | Direct drive RF circuit for substrate processing systems | Alexander Paterson | 2020-11-24 |
| 10784083 | RF voltage sensor incorporating multiple voltage dividers for detecting RF voltages at a pickup device of a substrate support | John Drewery, Alex Paterson | 2020-09-22 |
| 10734195 | Systems and methods for transformer coupled plasma pulsing with transformer coupled capacitive tuning switching | Alex Paterson | 2020-08-04 |
| 10715095 | Radiofrequency (RF) filter for multi-frequency RF bias | Alex Paterson | 2020-07-14 |
| 10672590 | Frequency tuning for a matchless plasma source | Yuhou Wang, Ying Wu, Alex Paterson | 2020-06-02 |
| 10649006 | Cathode RF asymmetry detection probe for semiconductor RF plasma processing equipment | Alex Paterson | 2020-05-12 |
| 10638593 | Matchless plasma source for semiconductor wafer fabrication | Yuhou Wang, Ricky Marsh, Alex Paterson | 2020-04-28 |