YW

Yuhou Wang

Lam Research: 3 patents #61 of 457Top 15%
Overall (2020): #61,079 of 565,922Top 15%
3
Patents 2020

Issued Patents 2020

Patent #TitleCo-InventorsDate
10879044 Auxiliary circuit in RF matching network for frequency tuning assisted dual-level pulsing Arthur H. Sato, Ying Wu, Alexander Paterson 2020-12-29
10672590 Frequency tuning for a matchless plasma source Maolin Long, Ying Wu, Alex Paterson 2020-06-02
10638593 Matchless plasma source for semiconductor wafer fabrication Maolin Long, Ricky Marsh, Alex Paterson 2020-04-28