Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879044 | Auxiliary circuit in RF matching network for frequency tuning assisted dual-level pulsing | Yuhou Wang, Ying Wu, Alexander Paterson | 2020-12-29 |
| 10679825 | Systems and methods for applying frequency and match tuning in a non-overlapping manner for processing substrate | Ying Wu, Alex Paterson, John Drewery | 2020-06-09 |