Issued Patents 2020
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784083 | RF voltage sensor incorporating multiple voltage dividers for detecting RF voltages at a pickup device of a substrate support | Maolin Long, John Drewery | 2020-09-22 |
| 10770339 | Automated replacement of consumable parts using interfacing chambers | Damon Tyrone Genetti, Jon McChesney, Derek John Witkowicki, Austin Ngo | 2020-09-08 |
| 10755896 | Multi-level pulsing of DC and RF signals | Juline Shoeb, Ying Wu | 2020-08-25 |
| 10734195 | Systems and methods for transformer coupled plasma pulsing with transformer coupled capacitive tuning switching | Maolin Long | 2020-08-04 |
| 10715095 | Radiofrequency (RF) filter for multi-frequency RF bias | Maolin Long | 2020-07-14 |
| 10690374 | Air cooled faraday shield and methods for using the same | Saravanapriyan Sriraman, John Drewery, Jon McChesney | 2020-06-23 |
| 10679825 | Systems and methods for applying frequency and match tuning in a non-overlapping manner for processing substrate | Ying Wu, John Drewery, Arthur H. Sato | 2020-06-09 |
| 10672590 | Frequency tuning for a matchless plasma source | Maolin Long, Yuhou Wang, Ying Wu | 2020-06-02 |
| 10658222 | Moveable edge coupling ring for edge process control during semiconductor wafer processing | Haoquan Yan, Robert Griffith O'Neill, Raphael Casaes, Jon McChesney | 2020-05-19 |
| 10649006 | Cathode RF asymmetry detection probe for semiconductor RF plasma processing equipment | Maolin Long | 2020-05-12 |
| 10638593 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Yuhou Wang, Ricky Marsh | 2020-04-28 |
| 10600620 | Temperature control in RF chamber with heater and air amplifier | Jon McChesney | 2020-03-24 |
| 10585347 | Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework | Saravanapriyan Sriraman, Richard Wise, Harmeet Singh, Andrew D. Bailey, III, Vahid Vahedi +1 more | 2020-03-10 |
| 10580618 | Multi-level pulsing of DC and RF signals | Juline Shoeb, Ying Wu | 2020-03-03 |
| 10573494 | Multi-level parameter and frequency pulsing with a low angular spread | Juline Shoeb, Ying Wu | 2020-02-25 |