Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790237 | Fiducial-filtering automatic wafer centering process and associated system | Benjamin W. Mooring | 2020-09-29 |
| 10770339 | Automated replacement of consumable parts using interfacing chambers | Jon McChesney, Alex Paterson, Derek John Witkowicki, Austin Ngo | 2020-09-08 |
| 10541168 | Edge ring centering method using ring dynamic alignment data | Ali Sucipto Tan, Haoquan Yan, Marc Estoque, Jon McChesney, Alexander Paterson | 2020-01-21 |