Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10541168 | Edge ring centering method using ring dynamic alignment data | Ali Sucipto Tan, Haoquan Yan, Damon Tyrone Genetti, Jon McChesney, Alexander Paterson | 2020-01-21 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10541168 | Edge ring centering method using ring dynamic alignment data | Ali Sucipto Tan, Haoquan Yan, Damon Tyrone Genetti, Jon McChesney, Alexander Paterson | 2020-01-21 |