Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10615009 | System implementing machine learning in complex multivariate wafer processing equipment | Joydeep Guha, John Daugherty, Richard A. Gottscho | 2020-04-07 |
| 10585347 | Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework | Saravanapriyan Sriraman, Richard Wise, Harmeet Singh, Alex Paterson, Andrew D. Bailey, III +1 more | 2020-03-10 |